Big data is a data collection that develops over time, and Industry 5.0 originated from an industrial revolution in Germany. This study used scientometric analysis to analyze 669 articles from the Scopus database from 2014 to 2022. It found that the number of publications on big data and Industry 5.0 research has increased in the last ten years, and the UK is the most powerful country in this field of study. This study focuses on 13 significant clusters related to IOT (internet of things) technology, such as smart building, big data management, self-organized multi-agent system, big data-driven sustainable smart manufacturing, key enabler, innovative development strategy, quality monitoring, big data service, supply chains, key enabler, industry, iot manufacturing value creation, and metabolic route. These clusters discuss the use of big data in aspects of health services 5.0, supply chains, key enablers, industry, IOT manufacturing value creation, and metabolic routes.